Fundamentals of micro and nanofabrication

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The course provides an in-depth understanding of top-down device fabrication. Focus is the unit processes typically used in micro & nanofabrication of devices. Both concepts and practical aspects are covered. Topics include crystal growth, doping, chemical vapor deposition, physical vapor deposition, photolithography, wet etching, dry etching, and packaging. The course is accessible to students from diverse backgrounds, such as materials, physics, chemistry, mechanical engineering, and electrical engineering.The course will be a derivative of NE203: Advanced Micro & Nano Fabrication Technology & Processes. Students from various departments outside CeNSE, e.g. Physics, Chemistry, ECE, DESE, IAP, routinely take the course. 

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COURSE LAYOUT

Week 1: Introduction to micro-fabrication
Week 2: Substrate
Week 3: Cleaning
Week 4: Additive processing: Doping
Week 5: Additive processing: Native Films
Week 6: Additive processing: CVD
Week 7: Additive processing: PVD
Week 8: Lithography 1
Week 9: Lithography 2
Week 10: Subtractive Process: Wet Etching
Week 11: Subtractive Process: Dry Etching
Week 12: CMP and Packaging

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    Fundamentals of micro and nanofabrication
    Fundamentals of micro and nanofabrication

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